00357nam a2200133Ia 4500008004100000041000800041082001700049100001700066245004100083260001100124300002200135365001600157700005000173230714s9999    xx            000 0 und d  aeng  a621.381bGAR  aGardner J.W.  aMicrosensors, MEMS And Smart Devices  bWiley   dRef 743 E (18677)  cRs.b995.00  aGardner J.W.; Varadan V.K. & Awadelkarim O.O.