00326nam a2200133Ia 4500008004100000041000800041082001700049100001300066245004900079260002700128300000800155365001600163700001300179230718s9999    xx            000 0 und d  aeng  a621.381bHSU  aHsu T.R.  aMems And Microsystems Design And Manufacture  c2002bTata McGraw-Hill  a436  cRs.b295.00  aHsu T.R.