TY  - BOOK
AU  - Gardner J.W.
AU  - Gardner J.W.,Varadan V.K. & Awadelkarim O.O.
TI  - Microsensors, MEMS And Smart Devices
U1  - 621.381 
PY  - 2002///
PB  - John Wiley & Sons
N1  - R743E
ER  -