00366nam a2200145Ia 4500008004100000020001800041041000800059082001700067100001500084245003000099260003700129300000800166365001600174700003000190230718s9999    xx            000 0 und d  a9781316609040  aeng  a621.381bJON  aJones T.B.  aElectromechanics And MEMS  c2016bCambridge University Press  a559  cRs.b950.00  aJones T.B. & Nenadic N.G.