00460nam a2200157Ia 4500008004100000020001800041041000800059082001900067100002200086245003500108250000800143260004600151300002000197500005400217700003100271220530s9999    xx            000 0 und d  a9788126529919  aeng  a621.38413bVAR  aVaradan, Vijay K.  aRF MEMS and Their Applications  a1st  aNew DelhibWiley & Sons Publicationc2011  aXII; 394 p.bPB  aSold By S.S.S. Enterprises,Coimbatore, Tamil Nadu  a Jose, K. A. Vinoy, K. J.