00298nam a2200109Ia 4500008004100000041000800041082001800049100001600067245004700083260004400130300001400174220530s9999    xx            000 0 und d  aeng  a621.3841bHSU  aHSU Ran Tai  aMEMS & Microsystems Design and Manufacture  aNew DelhibMcGraw Hill Publicatinc2017  a426 PbPB