000 00401nam a2200157Ia 4500
008 230718s9999 xx 000 0 und d
041 _aeng
082 _a621.381
_bHSU
100 _aHsu T.R.
245 _aMems And Microsystems Design And Manufacture
260 _c2002
_bTata McGraw-Hill
300 _a436
365 _cRs.
_b295.00
700 _aHsu T.R.
906 _dB:323914-Jan-2004
_cETC
_b59
999 _c306667
_d306667