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| 008 | 230718s9999 xx 000 0 und d | ||
| 041 | _aeng | ||
| 082 |
_a621.381 _bHSU |
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| 100 | _aHsu T.R. | ||
| 245 | _aMems And Microsystems Design And Manufacture | ||
| 260 |
_c2006 _bTata Mc-graw Hil |
||
| 300 | _a436 | ||
| 365 |
_cRs. _b350.00 |
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| 700 | _aHsu T.R. | ||
| 906 |
_d1006/14.10.06 _cETC _b70 |
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| 999 |
_c315168 _d315168 |
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