000 00443nam a2200157Ia 4500
008 230718s9999 xx 000 0 und d
041 _aeng
082 _a621.381
_bGAR
100 _aGardner J.W.
245 _aMicrosensors, MEMS And Smart Devices
260 _bWiley
300 _dRef 743 E (18677)
365 _cRs.
_b995.00
700 _aGardner J.W.; Varadan V.K. & Awadelkarim O.O.
_9188397
906 _dB:14803-Sep-2013
_cINST
_b746.25
999 _c333914
_d333914