000 00473nam a2200169Ia 4500
008 230718s9999 xx 000 0 und d
020 _a9781316609040
041 _aeng
082 _a621.381
_bJON
100 _aJones T.B.
_9196555
245 _aElectromechanics And MEMS
260 _c2016
_bCambridge University Press
300 _a559
365 _cRs.
_b950.00
700 _aJones T.B. & Nenadic N.G.
906 _dO:0523104-Aug-2016B:IN 33030-Jun-2016
_cINST
_b1282.5
999 _c342555
_d342555