000 00459 a2200181 4500
003 OSt
005 20240807144345.0
008 230908b |||||||| |||| 00| 0 eng d
020 _a9781608075270
041 _aEnglish
100 _aCostello Suzanne
_9204414
245 _aHermeticity testing of mems and Microelectronic Packages
260 _bArtech House
_c2013
300 _a195
500 _a932 I
700 _aDesmulliez Marc
_9204627
942 _cBK
999 _c355878
_d355878